Leveraging many years of piezo nanopositioning expertise expertise, introducing at 2024 Semicon West.
Auburn, MA – PI’s latest wafer inspection resolution relies on a hybrid kinematics design, combining Piezo-Stroll motors and piezo stacks to realize each lengthy journey and extremely dynamic, ultra-precise movement. This built-in 4-DOF resolution reduces tools complexity, integration efforts, prices, and dangers.
Picture Credit score:Â Physik Instrumente
Piezo-Stroll motors are self-locking at relaxation, including no servo dither and warmth, in contrast to different movement strategies. The excessive bandwidth of the short-travel piezo stack actuators permits for dynamic monitoring and error compensation of exterior disturbances (e.g., from lengthy journey XY wafer levels).
The 4DOF module can even right for rotational wafer misalignment and takes wafer thickness and machine static traits into consideration.
The high-stiffness design of the Tip-Tilt drive module gives extraordinarily quick step and settle (<10msec) and place stability (<0.05µrad).
Extra data on Piezo Stage for Wafer Inspection & Metrology
PI’s superior design experience and lengthy expertise as a provider to prime tier semiconductor producers and main system integrators allows us to know and meet the excessive calls for of the trade, together with copy precisely and assembly strict cleanroom necessities.
Industries Served
Semiconductors, Metrology, Optics, Photonics
